中文網
Taipei
Fri, Aug 12, 2022
23:30
mostly clear
29°C
CONNECT WITH US

Entegris licenses RSP and EUV technology to Gudeng

Jessie Shen, DIGITIMES, Taipei 0

Entegris has announced it has agreed to settle patent litigation and disputes with Gudeng Precision related to reticle pod technology for both conventional and EUV lithography. The resulting license agreements, the terms of which are confidential, resolve...

The article you are trying to open requires News database subscription. Please sign in if you wish to continue.
Related stories