Entegris, Gudeng competing for EUV pod orders

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Entegris, Gudeng competing for EUV pod orders

Monica Chen, Taipei; Jessie Shen, DIGITIMES

Monday 23 September 2019

Entegris and Gudeng Precision Industrial, both of which have received ASML certification for their reticle pods for high-volume IC manufacturing using extreme ultraviolet (EUV) lithography, are competing for orders from major chipmakers looking to ramp...

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