TSMC unlikely to adopt High-NA EUV for 2nm, A14 processes

Monica Chen, Hsinchu; Jessie Shen, DIGITIMES Asia 0

Credit: Samsung

TSMC has not placed orders for high-numerical aperture (High-NA) extreme ultraviolet (EUV) tools and is unlikely to use the technology in 2nm and 1.4nm (A14) process manufacturing, according to sources at fab toolmakers.

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