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Jean Chu, Shanghai; Jessie Shen, DIGITIMES Asia
Monday 2 October 2017
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Posted on Oct 2, 20:54
It seems the motivation here is for Chinese foundry to get headstart on 7nm with EUV-based fab. But actually, with the low uptime of the EUV tools, it could be a trap, as other EUV buyers have enough immersion tools for multi-patterning as backup.