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TSMC R&D VP recognized for contributions to lithographic manufacturing

Josephine Lien, Taipei; Jessie Shen, DIGITIMES Asia Wednesday 26 June 2013 0

Burn J Lin, VP of R&D at Taiwan Semiconductor Manufacturing Company (TSMC), has been recognized for his invention of liquid immersion lithography. The breakthrough allows the industry to continue using 193nm lithography for production at the 65nm...

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