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Development of advanced lithography technology (I): extension of the existing equipment path

Albert Lin, special to DIGITIMES Asia Monday 27 March 2023 0

Credit: ASML

Lithography technology is a mainstream means used by the semiconductor industry to define fine patterns. At present, the most advanced technology is EUV (extreme ultraviolet), and the latest mass production equipment is ASML's TWINSCAN NXE: 3600D. The...

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