Versaline
Versaline, the latest deposition and etching system for volume production from Unaxis Semiconductors. The tool is optimized for lowest cost of ownership for single process module applications and includes cassette-to-cassette loading. New benchmark setting processes are designed for etching and deposition on compound and silicon materials including MEMS and thin film head applications.
For further information please contact Jim Pollock at jim.pollock@unaxis.com.
Article edited by Zoran Pavlovski
