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Jessie Shen, DIGITIMES, Taipei
Friday 20 October 2017
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Posted on Oct 21, 18:17
In Q2/Q3 2017, 38 immersion tools were sold compared to 6 for EUV. So EUV is still not considered a certainty.Posted on Oct 21, 18:15
The expected power for sufficient dose is well over 250 W. So the pellicle is not proven yet.