中文網
Taipei
Tue, Aug 16, 2022
21:12
partly cloudy
34°C
CONNECT WITH US

TSMC R&D VP recognized for contributions to lithographic manufacturing

Josephine Lien, Taipei; Jessie Shen, DIGITIMES Asia 0

Burn J Lin, VP of R&D at Taiwan Semiconductor Manufacturing Company (TSMC), has been recognized for his invention of liquid immersion lithography. The breakthrough allows the industry to continue using 193nm lithography for production at the 65nm...

The article you are trying to open requires News database subscription. Please sign in if you wish to continue.
Related stories