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KLA-Tencor targets 10nm and below with new reticle inspection systems

Press release; Jessie Shen, DIGITIMES 0

KLA-Tencor has introduced three advanced reticle inspection systems that address 10nm and below mask technologies: the Teron 640, Teron SL655 and Reticle Decision Center (RDC). All three systems are key to enabling both current and next-generation mask...

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