KLA-Tencor intros flagship wafer inspection solution suite

Press release; Jessie Shen, DIGITIMES Asia 0

KLA-Tencor has announced three new wafer defect inspection systems for leading-edge chip manufacturers: the 2900, Puma 9650 and eS800 systems. Designed to address a wide range of defect issues that new materials, structures and design rules have imposed...

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