W. L. Gore & Associates are the inventors of expanded PTFE (ePTFE) and the makers of GORE-TEX fabric. Gore will be exhibiting new technology at SEMICON Taiwan (Booth 2024) that is important in the manufacturing of semiconductors and related products such as LCDs and LEDs.
GORE Filters for Semiconductor Applications are a major advancement in semiconductor process filtration technology. They allow flow rates 2-3X superior to those of all previously available membranes without sacrificing retention.
Gore's new ePTFE membranes are much more than a simple replacement part in the processing line. They enable numerous benefits:
- Improved Particle Retention in Existing Fluid (Chem and UPW) streams
- Reduced Particle Counts in Recirculation Baths
- Reduced Processing Time
The company has announced a major breakthrough in membrane filtration technology. This has resulted in GORE Filters for Semiconductor Applications, 30nm- to 100nm-rated cartridge filters for chemicals, dilute chemicals and ultrapure water in wet process tools.
GORE Filters enable semiconductor fabs to realize both improved performance and lower cost of ownership. The drop-in substitution of GORE Filters can enable upgraded retention performance and reduced particle counts while maintaining desired flow rate, the same flow rate with as few as one-third the number of filters, reduced capital costs associated with process upgrades, significant capital reduction when building new fabs, reduced processing times, higher flow rates and faster bath turnovers.
Gore is the inventor of ePTFE and the world technical leader in engineering PTFE materials. GORE® Filters benefit from Gore technology, used for decades in the world's best-performing filters for semiconductor, electronics, high-purity chemical and pharmaceutical applications.
With approximately US$2.5 billion in sales and more than 8,500 employees worldwide, W. L. Gore & Associates, Inc. specializes in innovations that improve the quality of life. In more than 50 years of product development, Gore has applied its world-renowned expertise to thousands of products for high-volume, cost-sensitive markets, such as automotive, energy, electronics, and industrial filtration. The company operates more than 45 facilities worldwide with headquarters in Newark, Delaware, USA.
New GORE Filters Dramatically Improve
Liquid Filtration Performance in
Semiconductor Manufacturing
Photo: Company