中文網
Taipei
Wed, Oct 27, 2021
05:22
mostly clear
22°C
CONNECT WITH US
KLA-Tencor announces new inspection portfolio for 3X/2Xnm nodes
Press release; Jessie Shen, DIGITIMES 0

KLA-Tencor has announced two new wafer inspection systems and a new electron-beam (e-beam) review system to address defect issues at the 3Xnm / 2Xnm nodes. Each new tool can preferentially detect and report yield-relevant defects, enabling fabs to more...

The article you are trying to open requires News database subscription. Please sign in if you wish to continue.
Related stories