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Josephine Lien, Taipei; Jessie Shen, DIGITIMES Asia
Monday 27 December 2010
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Posted on Dec 28, 12:47
It might be possible at least for now to do 3Xnm without immersion but using double patterning. By the time Taiwan really needs to do 2Xnm, immersion tools should be more plentiful and cheaper with more competition from Nikon in 2011.Posted on Dec 28, 12:17
The key question is why Taiwan does not have a Samsung like South Korea does.