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Current status of China's lithography equipment development: EUV

Albert Lin, Taipei; Jingyue Hsiao, DIGITIMES Asia Saturday 17 May 2025 0

Credit: AFP

While China's Ministry of Industry and Information Technology (MIIT) recently announced updates on deep ultraviolet (DUV) lithography, Shanghai Micro Electronics Equipment (SMEE) also disclosed its 2023 patent applications related to extreme ultraviolet...

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