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Quantity is quality: an interview with Burn Lin, father of immersion lithography

Rocky Uriankhai, DIGITIMES Asia Monday 24 April 2023 0

Burn Lin at his office in Hsinchu, Taiwan. Credit: DIGITIMES

During TSMC's conference held in Taipei on April 20, 2023, institutional investors made their inquisition on whether the cost and yield of the Fab 21 plant under construction in Arizona, US will drag down TSMC's overall profitability.

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