ASML has filed to Taiwan's Ministry of Economic Affairs for R&D subsidies to fund the development and production of 2nm wafer optical measurement equipment, a report by Taiwan's TechNews quoted unspecified government sources as saying.
The application will be assessed in two parts: how ASML's R&D initiatives help Taiwan's supply chain upgrade in terms of technology and how it will increase the country's chipmaking self-efficiency, with a final decision expected in May at the earliest, according to the report.
ASML reportedly planned a major expansion project in Taiwan. According to local media reporting throughout the country last year, the Dutch fab tool vendor is expected to break ground for a new production site in Linkou, New Taipei City, in July 2023.
ASML announced in August 2020 the opening of an EUV (extreme ultraviolet) training Center in Tainan, southern Taiwan for customers in Asia.
