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Imec demos vertically stacked GAA silicon nanowire CMOS transistors

Press release; Jessie Shen, DIGITIMES Asia 0

Nanoelectronics research center imec has reported for the first time the CMOS integration of vertically stacked gate-all-around (GAA) silicon nanowire MOSFETs. Key in the integration scheme is a dual-work-function metal gate enabling matched threshold...

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