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Hermes Microvision shipping e-beam inspection tools for 1Xnm processes

Patty Wang, Taipei; Steve Shen, DIGITIMES 0

E-beam inspection tool supplier Hermes Microvision (HMI) has begun shipping its eScan 500-series inspection tools for 1Xnm processes, which help ramp up its revenues in 2014, according to industry sources.

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