Bits + chips
MEMS to debut as a theme at SEMICON Taiwan 2009
Hans Wu, Taipei; Meiling Chen, DIGITIMES

There will be a MEMS pavilion at SEMICON Taiwan 2009 scheduled for September 30-October 2, according to SEMI Taiwan. The government-sponsored Industrial Technology Research Institute (ITRI) will showcase its R&D on MEMS technologies and applications...

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