Mapper and TSMC sign agreement for multiple e-beam lithography for 22nm node

Press release, October 14; Rodney Chan, DIGITIMES Asia Tuesday 14 October 2008 0

Mapper Lithography and Taiwan Semiconductor Manufacturing Company (TSMC) have signed an agreement, according to which Mapper will ship its first 300mm multiple-electron-beam maskless lithography platform for process development and device prototyping...

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