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KLA-Tencor installs mask inspection system for 45nm production at Toppan Printing

Press release, April 16; Michael McManus, DIGITIMES Asia Monday 16 April 2007 0

KLA-Tencor announced that Toppan Printing has installed the TeraScanHR mask inspection system in its most advanced production line for 45nm-generation photomasks, following a highly successful beta testing period.

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