TSMC: Immersion lithography nearly production ready; produces near-zero defect rates

Esther Lam,, Taipei 0

Taiwan Semiconductor Manufacturing Company (TSMC) revealed that its immersion lithography program has produced test wafers well within acceptable parameters for volume manufacturing, according to a company press release. TSMC's immersion lithography...

The premium content you are trying to open requires News database subscription. Please sign in if you wish to continue.