Starting from the manufacturing of Spectroscopic Ellipsometers for R&D in 1983, SOPRA has evolved towards in-line non-destructive materials control, producing some of the world’s most accurate instruments for thin-film metrology.
SOPRA systems are capable of measuring the most critical layers in the Integrated Circuit (IC) and Flat Panel Display (FPD) industries.
SOPRA has gained 400 references worldwide and continuously participates in major European R&D programs for semiconductors.
SOPRA addresses the Semiconductor market by offering a vast range of high-end metrology tools. From fully automatic control of 300mm product wafers with UV-VIS SE (SE 300, 190-850nm), and Infrared SE (IRSE 300, 600-6000cm-1) to semi-automated advanced controls of new materials and processes: GXR5 (Grazing X-Ray Reflectrometry), SE5 PUV (VUV-SE down to 140nm).
SOPRA has developed a specific measurement capability in some high-end market application segments, such as wafer manufacturing; equipment manufacturing; SiGe, SGOI and SSOI, high-k and low-k dielectrics.
SOPRA is proud to introduce a new Ellipsometer Porosimetry EP, licensed under IMEC and dedicated to low-K materials, open porosity and pore-size distribution. Information on barrier-layer integrity, pore geometry, presence of pore killers and the young modulus of ULK films can be extracted.
Infrared Ellipsometry for patterned wafers
In-line characterization on USJ, thin Epi, SiGe, Silicides, Barrier layers and low-k.
Grazing X-Ray Reflectrometry
Spectroscopic Ellipsometry
High-K dielectrics, SiGe
Ellipsometry Porosimetry
Open Porosity
Pore-Size Distribution
Pore Killers, Young Modulus
OPTICAL SOLUTIONS
Spectroscopic Ellipsometers
Excimer Lasers
SOPRA 26, rue Pierre Joigneaux 92270 BOIS-COLOMBES – France
Phone: +33 1 46 49 67 00
Fax: +33 1 42 42 29 34
E-mail: sales@sopra-sa.com
HALL 3 n°3428
www.sopra-sa.com
Article edited by Zoran Pavlovski
