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UMC to use Novellus PECVD systems for 90nm and 65nm processes

Press release; Jack Lu, DIGITIMES Asia Thursday 2 September 2004 0

United Microelectronics Corporation (UMC) will use Novellus System’s Vector plasma-enhanced chemical vapor deposition (PECVD) systems to produce chips at 90nm design and to help develop its 65nm technology.

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