TSMC, UMC stay on FSG for initial 90-nm production

Samson Yu, Taipei; Wen-Yu Lang, DIGITIMES Asia Monday 24 November 2003 0

Taiwan Semiconductor Manufacturing Company (TSMC) and United Microelectronics Corporation (UMC) are expected to keep using fluorinated silicate glass (FSG), a dielectric material, for their initial 90-nanometer (nm) production, according to sources.

The premium content you are trying to open requires News database subscription. Please sign in if you wish to continue.

Email address

Password

Save my User ID and Password

Save my User ID and Password

Some subscribers prefer to save their log-in information so they do not have to enter their User ID and Password each time they visit the site. To activate this function, check the 'Save my User ID and Password' box in the log-in section. This will save the password on the computer you're using to access the site.

Note: If you choose to use the log-out feature, you will lose your saved information. This means you will be required to log-in the next time you visit our site.

NEW individual users please REGISTER first.

Enterprise user first-time LOGIN.

I forgot my ID and/or password?

MEMBERSHIP BENEFITS