TSMC, UMC stay on FSG for initial 90-nm production

Samson Yu, Taipei; Wen-Yu Lang, DIGITIMES Asia 0

Taiwan Semiconductor Manufacturing Company (TSMC) and United Microelectronics Corporation (UMC) are expected to keep using fluorinated silicate glass (FSG), a dielectric material, for their initial 90-nanometer (nm) production, according to sources.

The premium content you are trying to open requires News database subscription. Please sign in if you wish to continue.