Nikon Precision announced that it plans to begin volume production of a 193nm-wavelength ArF Step and Repeat Scanning System for 0.13-0.15-micron processing in the spring of 2001.
The article requires paid subscription. Subscribe Now
Nikon Precision announced that it plans to begin volume production of a 193nm-wavelength ArF Step and Repeat Scanning System for 0.13-0.15-micron processing in the spring of 2001.