ASML announces installation of first HMI eScan 1100 multibeam system

Rodney Chan, DIGITIMES, Taipei 0

Credit: ASML

ASML has announced the first customer installation of its HMI eScan 1100, the first multiple e-beam (multibeam) wafer inspection system for in-line yield enhancement applications, including voltage contrast defect inspection and physical defect inspe...

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