中文網
Taipei
Fri, Dec 2, 2022
04:41
light rain
19°C
CONNECT WITH US

AMEC intros ICP etcher for advanced memory and logic IC designs

Jessie Shen, DIGITIMES, Taipei 0

At the ongoing SEMICON China, Advanced Micro-Fabrication Equipment (AMEC) has unveiled its Primo nanova system - the company's first inductively coupled plasma (ICP) etcher for high-volume front-end production of memory and logic ICs.

The premium content you are trying to open requires News database subscription. Please sign in if you wish to continue.
Related stories