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Automated systems: Greatest challenge for 12-inch wafer fabs in the future

Carol C.Y. Hsu, Hsinchu; Christy Lee, DIGITIMES Asia Monday 30 April 2001 0

Taiwan Semiconductor Manufacturing Company (TSMC) and United Microelectronics Corporation (UMC) still face major hurdles in improving the automated conveyor systems of their 12-inch fabs.

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