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SKMP develops high-thickness KrF photoresist to enhance competitiveness of 3D NAND processes

Daniel Chiang; Judy Lin, DIGITIMES Asia Tuesday 28 November 2023 0

Credit: SKMP

SK Group's KRW40 billion (US$31 million) acquisition of Kumho Petrochemical's electronic material business in 2020 is bearing fruit. SK Materials Performance (SKMP), the new subsidiary following the acquisition, has developed a high-thickness KrF photoresist...

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