Bits + chips
EUV to get ready for high-volume production in 2014, says IMEC chief
Nancy Cheng, Taipei; Jessie Shen, DIGITIMES

Extreme ultraviolet (EUV) lithography is likely to reach mass production in 2014 at the earliest, according to Luc Van den hove, president and CEO of Belgian researcher IMEC. But he does not expect the commercialization of maskless lithography to take...

The article you are trying to open requires News database subscription. Please sign in if you wish to continue.
Realtime news
© 2019 DIGITIMES Inc. All rights reserved.
Please do not republish, publicly broadcast or publicly transmit content from this website without written permission from DIGITIMES Inc. Please contact us if you have any questions.