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Ulvac develops and sells 'ENTRONTM-EX2 W300 CVD-Ni/CVD-Co' film formation system for the silicide process for 3D devices

Company [Friday 2 December 2011]

ULVAC, Inc. announces that it has developed a new system to enhance its "ENTRONTM-EX W300" 300mm system series, which has a proven track record at plants mass producing semiconductors worldwide. The newly-developed "ENTRONTM-EX2 W300 CVD-Ni/CVD-Co" system offers CVD-Ni and CVD-Co processing for 3D devices. Its processing capabilities vastly improve productivity and enable greater investment efficiency. The new "ENTRONTM-EX2 W300 CVD-Ni/CVD-Co" system will be available for sale from April 2012.

Category: Product launch | Posted: Dec 2, 09:45 | More info


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