TSMC, UMC stay on FSG for initial 90-nm production
Samson Yu, Taipei; Wen-Yu Lang, DIGITIMES
Taiwan Semiconductor Manufacturing Company (TSMC) and United Microelectronics Corporation (UMC) are expected to keep using fluorinated silicate glass (FSG), a dielectric material, for their initial 90-nanometer (nm) production, according to sources.
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