Taipei, Monday, October 5, 2015 06:27 (GMT+8)
partly cloudy
Applied Materials claims breakthrough in CVD for advanced chip designs
Press release; Jessie Shen, DIGITIMES [Wednesday 25 August 2010]

Applied Materials has unveiled a new chemical vapor deposition (CVD) technology capable of electrically isolating the densely-packed transistors in 20nm-and-below memory and logic designs with a high-quality dielectric film. The gaps between these transistors can have aspect ratios of more than 30:1 - five times higher than current requirements, the tool vendor claimed.

Using Applied's proprietary Eterna flowable CVD (FCVD) process, the system delivers a liquid-like film that flows freely into any structure shape to provide a bottom up, void-free fill, the vendor said.

Applied said its Eterna FCVD tools are being installed at six customer sites for DRAM, flash and logic applications.

"The need to fill smaller and deeper structures in advanced chip designs creates a physical roadblock for existing deposition technologies. Applied has broken through this barrier today with the introduction of its new Eterna FCVD system – delivering the disruptive technology that can enable the continued progress of Moore's Law," said Bill McClintock, VP and GM of Applied's DSM/ CMP business unit.

Eterna FCVD system

Applied Eterna FCVD system
Photo: Company

Developments in the UV LED industry
2015 China smartphone panel trend forecast
2015 global notebook demand forecast
  • Wireless broadband developments in Southeast Asia markets

    As of 2013, the 10 ASEAN nations had a total of over 700 million mobile subscriptions, with the CAGR from 2003-2013 reaching 24%. This Digitimes Research Special Report analyzes the various mobile broadband markets in ASEAN and looks at the respective trends in 4G LTE development for those markets.

  • 2015 global tablet demand forecast

    This Digitimes Research Special Report provides a 2015 forecast for the global tablet market and analyzes the strategies of key market players such as Google, Apple, Intel, and Microsoft.

  • 2015 China smartphone panel trend forecast

    This Digitimes Research Special Report analyzes the strategies of key China-based major panel makers BOE, Tianma and IVO for attacking the different market segments through technology and pricing, and their relationship to local vendors Huawei, Lenovo, ZTE, Xiaomi and Coolpad.