ASML could ship EUV systems by 2009

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ASML could ship EUV systems by 2009

Claire Sung, Taipei; Rodney Chan, DIGITIMES

Friday 14 September 2007

ASML Holding has claimed that it has received orders for its extreme ultraviolet (EUV) solutions from a few clients, and shipments may begin as early as 2009 for pilot runs at the clients.

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