Bits + chips
Facing longer lead times for lithography tools, TSMC, UMC to ramp 0.13-micron production at 8-inch fabs
Samson Yu, Taipei; Jack Lu, DIGITIMES

Taiwan Semiconductor Manufacturing Company (TSMC) and United Microelectronics Corporation (UMC) plan to ramp 0.13-micron technology at their 8-inch fabs due to extended lead-times of 193-nm lithography tools, according to foundry sources.

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