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TSMC EUV litho equipment purchases to top 50 sets

Monica Chen and Siu Han, Taipei; Jessie Shen, DIGITIMES Asia Monday 28 September 2020 0

TSMC is expected to cumulatively purchase about 55 sets of EUV lithography equipment by the end of 2021, as the foundry is stepping up its EUV process manufacturing development, according to industry sources.

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