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TSMC's refusal of ASML's expensive High-NA EUV equipment, explained

Monica Chen, Hsinchu
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Credit: DIGITIMES

ASML has launched its 0.55 High Numerical Aperture Extreme Ultraviolet (High-NA EUV) in an effort to extend Moore's Law. The market had originally expected TSMC to adopt it first, but the company has held back. TSMC Senior Vice President of Global Business...

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