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Restricting TSMC benefits SMIC, multi-patterning prohibitively costly, said lithography guru

Monica Chen, Taipei; Jingyue Hsiao, DIGITIMES Asia 0

Burn Lin, former TSMC VP for R&D

With the ongoing US-China tensions, Huawei exemplified its ability to make 7nm chips without EUV equipment, and chip guru Burn Lin believes it's not surprising for Huawei to achieve the milestone, but making 5nm chips with multi-patterning on DUV equipment...

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