Globalfoundries to adopt EUV for 7nm FinFET

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Globalfoundries to adopt EUV for 7nm FinFET

Jean Chu, Shanghai; Jessie Shen, DIGITIMES

Wednesday 25 October 2017

Globalfoundries will first use EUV lithography technology in its 7nm FinFET node, and has started to work with AMD in the process development, said company CTO Gary Patton at a recent event held in Shanghai.

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