Taipei, Thursday, August 24, 2017 16:39 (GMT+8)
thunderstorms
Taipei
35°C
KLA-Tencor 2910 series optical inspection system and eDR-7100 e-beam review tool
Photo: Company [Jul 18, 2013]

KLA-Tencor has announced the new 2910 series optical wafer defect inspection platform with NanoPoint technology and the new eDR-7100 electron-beam wafer defect review system.

Meeting IC manufacturers' need for accelerated defect sourcing on advanced devices, these two tools combine increased speed with seamless connectivity to find and identify defects that inhibit yield and reliability. The 2910 series' improved defect capture and the eDR-7100's enhanced review resolution have been demonstrated by detecting and imaging unique defects located at the bottom of three-dimensional or vertical pattern structures such as FinFETs.

Multiple 2910 series optical inspection tools, configured as either the 2910 or 2915, and eDR-7100 e-beam review tools have been installed at leading IC manufacturers where they are being used for new technology development and ramp, according to the company.

Yilan Science Park
Global AP demand forecast, 2017-2020
Global notebook shipment forecast, 2017 and beyond
  • China AMOLED panel capacity expansion forecast, 2016-2020

    This Digitimes Research Special Report examines the China AMOLED industry, focusing on the expansion capacity of the makers, the current implementation plans of major smartphone vendors in the market and the technological hurdles faced by the China makers.

  • Taiwan server shipment forecast and industry analysis, 2017

    Digitimes Research estimates that revenues from sales of server motherboards, servers, storage systems and related network system equipment by Taiwan-based vendors reached NT$555.8 billion in 2016 and the amount is estimated to grow 5.9% on year in 2017.

  • Global notebook shipment forecast, 2017 and beyond

    This Digitimes Special Report examines key factors in the notebook industry, including products, vendors and ODMs, that will affect total shipments in 2017 and through 2021.