Taipei, Sunday, April 20, 2014 01:57 (GMT+8)
mostly cloudy
Taipei
24°C
IMEC EUV sensor dies
Photo: Company [Oct 13, 2011]

IMEC has successfully qualified a chipset consisting of custom high-quality EUV sensor dies. These are now being integrated in ASML's NXE:3100 EUV lithography tools in the field, improving the tools' overlay and critical dimension (CD) tool performance, IMEC said.

The sensors were processed according to ASML's custom designs and specifications, with focus on superior lifetime and sensitivity to direct and high EUV irradiation doses. Two of the sensors are designed to calibrate, align and focus tool's lens systems. They have been integrated in functional sensor modules, and are being integrated in the NXE:3100 machines in the field. A third sensor is designed to monitor the NXE:3300's EUV dose.

IMEC revealed that the next milestone in progress is to build and qualify the different sensors for the NXE:3300 by the end of 2011.

Global tablet tracker
China touch tracker
2014 global mobile application processor market forecast
  • 2014 China smartphone market and industry - Forecast and analysis

    Digitimes Research expects demand in the domestic China market to reach 422 million smartphones in 2014, with 278 million units contributed by China-based smartphone vendors.

  • 2014 global mobile application processor market forecast

    This report provides a market forecast of the 2014 application processor market. The analysis includes the development and market strategies for each major AP vendor, thus providing readers with a roadmap for how the market will develop in 2014 and the role of the major players.

  • 2014 global tablet demand forecast

    This report analyzes the main players, their strategies and shipments forecasts for 2014, as well as other factors contributing to either growth or decline in various segments within the tablet market, with a particular focus on Apple, Google, Samsung, and Microsoft, along with whitebox vendors.