Taipei, Wednesday, May 22, 2013 21:53 (GMT+8)
light drizzle
Taipei
25°C
KLA-Tencor Surfscan SP3
Photo: Company [Jul 18, 2011]
KLA-Tencor has announced a new generation in the Surfscan family of wafer defect and surface quality inspection systems: the Surfscan SP3. As the first unpatterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination, the Surfscan SP3 systems feature advances in sensitivity and throughput over their predecessor, the Surfscan SP2XP. The Surfscan SP3 platform is also designed for extension to the next wafer size: 450mm.

The Surfscan SP3 system is designed to help develop and manufacture substrates for 28nm and sub-28nm devices. KLA-Tencor's engineers have built the Surfscan SP3 inspection system with the DUV sensitivity and throughput needed to reliably identify critical defects and surface quality issues inline during substrate manufacturing, the vendor said.

In the IC fab, manufacturers must also be able to monitor rough and smooth unpatterned films after deposition and chemical mechanical polish (CMP) to ensure that process tools are not adding defects. The Surfscan SP3 leverages its DUV wavelength, special apertures and multiple illumination and collection channels to address 28nm node requirements for defect detection and classification on blanket films at production speeds. The SP3 also offers a module that inspects the back side of wafers for defects that might deform the wafer shape during photolithography.
  • Gigabyte+GV%2DR799D5%2D6GD%2DB+graphics+card

    Gigabyte GV-R799D5-6GD-B graphics card

    Gigabyte Technology has introduced its latest Radeon HD 7990-based graphics card, GV-R799D5-6GD-B featuring the Graphics...

    Photo: Company, Apr 30.

  • Samsung+Galaxy+Mega

    Samsung Galaxy Mega

    Samsung Electronics has announced the Galaxy Mega - a 6.3-inch smartphone. The device is also light and thin, portable...

    Photo: Company, Apr 16.

  • Samsung+Galaxy+Note+8%2E0

    Samsung Galaxy Note 8.0

    Samsung Electronics has announced that the Galaxy Note 8.0 is coming to the US market on April 11. Unveiled globally at...

    Photo: Company, Apr 12.

  • AUO+65%2Dinch+Ultra+HD+TV+panel

    AUO 65-inch Ultra HD TV panel

    AU Optronics (AUO) is exhibiting a 65-inch Ultra HD TV panel at the China Information Technology Expo & China Optoelectronics...

    Photo: Company, Apr 10.

22-May-2013 markets closed

 LastChange

TAIEX (TSE)8398.84+15.79+0.19% 

TSE electronic317.55+0.70+0.22% 

GTSM (OTC)120.71+0.33+0.27% 

OTC electronic145.64+1.03+0.71% 

Smartphone industry and market, 2013 forecast
2013 global tablet forecast
  • Samsung reportedly to outsource more chips

    Samsung Electronics reportedly is looking to expand the purchase of memory products, including mobile DRAM chips and eMMC NAND devices, from outside.

  • Micron reaches deal to acquire Elpida

    Micron Technology and Elpida Memory's trustees have reached an agreement for Micron to acquire Elpida. Micron also announced a separate agreement with...

  • Taiwan DRAM firms mull fab sales

    Taiwan-based DRAM chipmakers including Powerchip Technology and ProMOS Technologies are considering selling fabs in order to preserve cash and strengthen...

  • Samsung foundry biz expanding

    Specializing in the manufacture of memory chips and LCD panels, Samsung's component operations are undergoing a focus shift to advanced process design...

  • Trends and shipment forecast for 2H 2012 tablet market

    Digitimes Research remains conservative about the prospects for the period, with half-year shipments projected to reach 49.18 million units and whole-year shipments being revised downward to 88.69 million units.

  • Trends in the China video market

    In addition to strong potential video content demand in China, the market has developed rapidly due to government intervention and delays in establishing copyright protections.

  • Trends in Asia LED chip manufacturing industry

    Asia is playing an ever more important role in upstream LED chip manufacturing. The region accounted for 80% of MOCVD demand in 2011 and will account for 90% in 2012, largely because Taiwan, Japan, South Korea and China are the major global centers for LED chip production.