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KLA-Tencor 8900 inspection system
Photo: Company [Oct 19, 2009]

KLA-Tencor has extended its product offerings in the CMOS image sensor (CIS) market by announcing the 8900 defect inspection system.

The new 8900 offers selectable illumination wavelengths, color-matched to CIS pixels; simultaneous brightfield and darkfield optical channels to enable capture of a wide variety of defect types; and adjustable sensitivity and throughput settings for cost-effective defect management from initial product development through volume production of color filter arrays (CFA).

The 8900's ability to inspect any of the filter or micro-lens layers can help reduce materials waste and cycle time, the company said.

An 8900 defect inspection system was recently installed at the first 300mm advanced CFA fab of Toppan Printing Company, an industry leader in color filters, KLA-Tencor revealed.

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