Bits + chips
ASML to start shipping EUV systems for sub 22nm node by 2010
Claire Sung, Taipei; Jessie Shen, DIGITIMES

Shipments of semiconductor equipment supplier ASM Lithography's (ASML's) extreme ultraviolet (EUV) systems for 22nm and sub-22nm process nodes are expected to kick off by 2010, according to the company. EUV is considered to be the future mainstream...

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