KLA-Tencor unveils next-generation e-beam inspection system to accelerate transistor innovation at 65nm and smaller nodes

Press release; Stephen Taylor, DIGITIMES Asia Friday 3 February 2006 0

KLA-Tencor on February 2 (in the US) introduced the eS32 – an extension of its e-beam inspection platform that the company is hoping will help accelerate transistor innovation at the 65- and 45nm nodes. The announcement indicated that volume shipments...

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