Sumitomo schedules photoresist production for 32nm EUV lithography by 2008

Vyacheslav Sobolev, DigiTimes.com, Taipei Friday 16 September 2005 0

At the recently concluded SEMICON Taiwan, Japan-based Sumitomo Chemical revealed a roadmap for its Sumiresist materials used in semiconductor photolithography to form a patterned coating on the surface of a substrate. According to the roadmap, the company...

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